On-Board® Cryopumps

With completely integrated controls and complementary peripherals, On-Board Cryopumps offer improved uptime and reliable performance, which raises tool productivity and uptime overall.

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Key Features

  • The Fast RegenTM feature prolongs the cryopump’s lifespan in between regenerations.
  • Networking your cryopumps enables simultaneous regeneration, which accelerates system regeneration overall.
  • An embedded microprocessor control to improve efficiency, carry out maintenance tasks, and facilitate communication
  • Advanced software and user-friendly graphical user interfaces to greatly enhance functionality and performance
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