On-Board® Cryopumps

Key Features

The Fast RegenTM feature prolongs the cryopump’s lifespan in between regenerations.
Networking your cryopumps enables simultaneous regeneration, which accelerates system regeneration overall.
An embedded microprocessor control to improve efficiency, carry out maintenance tasks, and facilitate communication
Advanced software and user-friendly graphical user interfaces to greatly enhance functionality and performance

Specifications

On-Board Cryopump Model	4F	8	8F	10	10F	250F	400	500
Pumping Speeds – litres/sec.
Water Vapour	1,100	4,000	4,000	9,000	9,500	6,500	17,500	30,000
Air	370	1,500	1,500	3,000	3,600	2,200	6,000	10,000
Hydrogen	370	2,500	2,200	5,000	6,000	3,200	12,000	12,000
Argon	310	1,200	1,200	2,500	3,000	1,800	5,000	8,400
Capacity – std. litre
Argon	210	1,000	1,000	2,000	2,000	1,000	2,500	6,000
Hydrogen (5×10^-6 Torr)	3	17	12	24	24	16	42	45
Nominal Regeneration Time (cold to cold)
First and Second Stage	75 min	2.5 hrs	2.5 hrs	2.5 hrs	2.5 hrs	<3.3 hrs	3 hrs	<3.8 hrs
Second Stage	<1 hr	<1 hr	<1 hr	<1 hr	<1 hr	<1.5 hrs	<1.5 hrs	–