Key Features
- Pumps over 16,000 liters of water vapor per second, enhancing process quality and cutting cycle time in a variety of applications.
- Pumps a range of hydrocarbon gas impurities at a pace that is five to ten times faster than turbopumps, all the while minimizing end-product faults.
- Increases the speed of the turbopump’s water vapour pump by eight times when used in process chambers or load-locked transfers.
- Vibration level lower than the On-Board® cryopump range
- It uses an existing helium system and can run at a low cost and small footprint because it does not require a huge closely linked compressor.
- Available in a range of sizes to satisfy user needs for inline or insitu configurations
- Simple setup
