Stable Vacuum Performance
- Decreased Variation in H2 Pumping Speed Across Regenerations
- Diminished Effect on H2 Pumping Speed as a Result of Photoresist Pollution
- optimized steady temperatures for the array
Cryopumps
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On-Board® IS 320F XVS Cryopump
The On-Board® IS 320F XVS cryopump is the ideal solution to the problems faced by today’s ion implant applications since it is built to provide the best hydrogen pumping performance for increased process yield and throughput. Better process quality, consistent vacuum, and uptime are guaranteed by the intelligent system control included into the cryopump. It also provides real-time system information for the best possible control of array temperatures. Automatic response to changing thermal/gas loading circumstances improves vacuum quality.
Enhanced Vacuum Performance
- Elevated H2 Pumping Rate: 15,500 L/S
- 40 STD-L High H2 Capacity
System Compatibility
- Compressors: IS-1000, IS-2000V
- IS-1800 XVS On-Board IS Cryopump Systems
