On-Board® IS 320F XVS Cryopump

The On-Board® IS 320F XVS cryopump is the ideal solution to the problems faced by today’s ion implant applications since it is built to provide the best hydrogen pumping performance for increased process yield and throughput. Better process quality, consistent vacuum, and uptime are guaranteed by the intelligent system control included into the cryopump. It also provides real-time system information for the best possible control of array temperatures. Automatic response to changing thermal/gas loading circumstances improves vacuum quality.