Variants
8200 Compressor
This compressor is made to work best with On-Board Waterpumps, On-Board Cryopumps, and Cryo-Torr Cryopumps. It can handle any size pump up to eight inches. Because of the 8200’s adaptable design, you can put the compressor wherever it will work best for your system.
9600 Compressor
The 9700A Compressor’s higher helium output makes it perfect for running several cryopumps. One 9700A Compressor offers a single compressor solution in numerous multiple cryopump and waterpump applications. Compatible with both Cryo-Torr and On-Board cryopumps, the 9700A Compressor minimizes power usage, water distribution, and footprint when compared to multiple compressor applications.
IS Compressors
The IS-1000 Compressor is a sophisticated and highly efficient compressor designed for use with On-Board IS Cryopumps. Six On-Board IS-8F Cryopumps can be supported by the IS-1000 Compressor in the same footprint as a 9600 Compressor.
The IS-2000V Compressor, which complies with SEMI S-23 standards, uses a combination of rotary technology, increased pressure, and flexible helium delivery to provide the lowest power consumption throughout operation. Two IS-1000 On-Board compressors are replaced by the IS-2000V. Applications for On-Board IS Cryopump are supported by this high capacity helium compressor. For applications at both 50 and 60 Hz, maximum cryopump performance is ensured via an integrated cryopump power frequency converter.
