Key Features
The cryopump system’s separate components are continuously monitored and adjusted by the proprietary distributed control system.
keeps the system’s vacuum performance at its peak, providing remarkable process consistency.
Fastest regeneration times for single and multiple pump setups
Minimal energy and cooling water use without sacrificing vacuum performance
Simple system integration Quick installation for production
Improved remote tracking for predictive and preventative maintenance
IS 320FX Cryopump
With the quality, performance, and dependability you have come to expect, the On-Board® IS 320FX Cryopump offers increased hydrogen pumping speed and capacity. It was created especially to meet the demands of modern Ion Implant techniques.
- Especially created for use with ion implants
- tailored to increase tool throughput
- “Self-adjusting” technology that is intelligent
- Reduced ownership costs
- A higher uptime
IS XP
Increased capacity for PVD applications to reach peak productivity while preserving process transparency is provided by the On-Board® IS XP Cryopump. Simultaneously, it makes use of the On-Board® IS’s established energy efficiency, reliable performance, and affordable ownership.
- gives capacity overhead for upcoming process upgrades
- Reduced ownership costs
- Uptime that is higher Intelligent “self-adjusting” technology for reliable vacuum operation
